Tribology Issues and Opportunities in MEMS Viola Eckelt Providing a state of the

Providing a state of the art overview of research in these topics

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Tribology Issues and Opportunities in MEMS Viola Eckelt Providing a state of theMicro Electro Mechanical Systems (MEMS) is already about a billion dollars a year industry and is growing rapidly. So far major emphasis has been placed on the fabrication processes for various devices. There are serious issues related to tribology, mechanics, surfacechemistry and materials science in the operationand manufacturingof many MEMS devices and these issues are preventing an even faster commercialization. Very little is understood about